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TranslationMobile

"flow" in Chinese : vi. 1.流，流動(dòng)。 2.(血液等)流通，循環(huán)。 3. ...
"pattern" in Chinese : n. 1.模范，榜樣；典范。 2.型，模型；模式；雛型； ...
"defect" in Chinese : vi. 叛變；逃走。 He defected to th ...
"pattern defect" in Chinese : 花紋缺陷
"flow pattern" in Chinese : 活動(dòng)模; 料流形態(tài); 吝譜; 流動(dòng)圖形; 流動(dòng)型態(tài); 流態(tài); 流線譜; 流線 ...
"pattern of flow" in Chinese : 流態(tài)
"aerodynamic lag of flow pattern" in Chinese : 流型的空氣動(dòng)力滯后
"air flow pattern" in Chinese : 氣流圈
"air-flow distribution pattern" in Chinese : 氣流分布圖
"anisometric flow pattern" in Chinese : 非等粒流動(dòng)型式
"atmo heric flow pattern" in Chinese : 大氣氣流模式
"atmospheric flow pattern" in Chinese : 大氣氣流模式
"constant circulation flow pattern" in Chinese : 等環(huán)量流型
"cross-channel flow pattern" in Chinese : 跨螺槽流動(dòng)圖形
"distortion of flow pattern" in Chinese : 流型的畸變

The study results obtained by afm suggest that the flow pattern defects were revealed as having wedge shape and there were small octahedron voids surrounded by { 111 } which were the same as cops and lstds planes were observed at the tips of flow pattern defects
用原子力顯微鏡對(duì)fpds結(jié)構(gòu)的研究結(jié)果表明， fpds缺陷形如拋物線，并且在其端部存在有和cops 、 lstds缺陷相同的由{ 111 }面構(gòu)成的八面體空洞。
In this paper , the flow pattern defects ( fpds ) were revealed by secco etchant and their shape , distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ) . the relationship between etching time and the tip structure of fpds was also discussed . furthermore , by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar , the annihilation mechanism of fpds was discussed in this paper
本文將cz硅單晶片在secco腐蝕液中擇優(yōu)腐蝕后，用光學(xué)顯微鏡和原子力顯微鏡對(duì)流動(dòng)圖形缺陷( flowpatterndefects , fpds )在硅片中的形態(tài)、分布及其端部的微觀結(jié)構(gòu)進(jìn)行了仔細(xì)地觀察和研究，并討論了腐蝕時(shí)間對(duì)fpds缺陷端部結(jié)構(gòu)的影響；本文還通過研究ar氣氛下快速退火( rapidthermalannealing , rta )對(duì)fpds缺陷密度的影響，初步探討了fpds的消除機(jī)理。