The refractory metals and refractory metal silicides that are used to augment or replace the polysilicon are generally deposited by physical vapor deposition processes . 用于增強和取代多晶硅的難熔金屬和難熔金屬硅化物通常是用物理蒸發(fā)沉積工藝沉積的。
An analytical model for polysilicon quantization in mos devices 退化建模與仿真方法
The etch of polysilicon emitter bipolar technology 技術中多晶發(fā)射極的腐蝕
Piezoresistive effect of polysilicon films at high temperature 多晶硅薄膜的高溫壓阻效應
Preparation for polysilicon acid polyferric sulfatecoagulant 無機高分子混凝劑聚硅硫酸鹽的制備