Based on the convergence criterion of root - mean - square ( rms ) of phase and output power , the actual intensity on reflectors are solved with fox - li iteration so that the deformations of mirrors and one - way phaseshifts are calculated . by simulating one - way phaseshifts with zernike polynomial , the laser modes are studied with method of iteration and geometriy . the evaluation factors of components influences on beam quality is discussed 根據(jù)相位均方根值迭代收斂準則和輸出功率,用fox - li迭代法求出反射鏡上實際的光強分布和熱源,得到鏡面的位移變形和單程附加相移,以zernike多項式擬合單程附加相移,分別用迭代法和幾何法計算了腔鏡變形時的腔模光場,建立了光學元件對光束質(zhì)量影響的評價因子,研究腔鏡冷卻效果和冷卻方式,對輸出耦合鏡的變形進行了分析。