Formation of silicon pit and study on method of electrochemical micromachining of deep macropore array 硅誘導(dǎo)坑形成及深孔列陣電化學(xué)微加工工藝方案的探討
According to theoretic and experimental investigation , crystal direction has nothing to do with forming square - holes 通過(guò)理論和實(shí)驗(yàn)研究,發(fā)現(xiàn)即使硅片晶向不準(zhǔn),仍能刻蝕出方孔列陣。
In this dissertation , organic laser dyes and cu were implanted in the pores of anodic alumina respectively . the optical properties of the embedded films were studied 本文利用多孔鋁的納米多孔列陣結(jié)構(gòu),將有機(jī)激光染料和金屬cu分別鑲嵌到多孔鋁的孔中,研究了其光學(xué)性質(zhì)。
Circulating device is needed in electrochemical etching course . the consequences are benefit to silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about silicon deep - holes etching technology 其結(jié)果對(duì)進(jìn)一步開展這方面的研究工作具有指導(dǎo)意義,在進(jìn)一步深入開展研究電化學(xué)體硅微加工技術(shù)時(shí),可有望成為實(shí)現(xiàn)硅深孔列陣加工的新技術(shù)。