Mems ( micro electromechanical system ) has become one of the most rapidly development technologies . along with the rapid development of mems techniques , capacitive sensor is used widely whose capacitance changes small , which has put forward the new request to the measurement technique . the common measure for capacitance measurement is that convert capacitance to voltage , electric current or frequency . the area of polar plate of the capacitor becomes smaller and smaller , and the total capacitance of micro capacitive sensor is usually several pico farad only . as a result , its change amount is smaller Mems ( microelectromechanicalsystem )近年來發(fā)展最快的技術(shù)之一,隨著mems技術(shù)的快速發(fā)展,電容式加速度計的電容變化變化量越來越小,對檢測技術(shù)提出了新的要求。在電容式傳感器中,常用電容檢測電路是將其轉(zhuǎn)換為電壓、電流或者頻率信號。目前的微型電容傳感器的極板面積變得越來越小,電容總量只有幾個pf ,變化量就更小。