Finite element method and matlab methods are used to simulate the film thickness uniformity . a rotating plane holder is discussed . the influencing parameters of film thickness uniformity , and the method of adjusting the parameters are studied 在分析均勻性的過程中,引入了有限元的思想,利用有限元法ansys和matlab相結合,模擬計算了旋轉平面夾具的膜厚均勻性,分析了均勻性的影響因素,指出了工藝中的調整方法。