A monolithically integrated optoelectronic receiver is presented 摘要設(shè)計了一種單片集成的光電接收機芯片。
Implemented in the present deep sub-micron ms / rf ( mixed signal, radio frequency ) cmos, this monolithically oeic takes advantage of several new features to improve the performance of the photo-diode and eventually the whole oeic 這種單片集成接收機采用了先進的深亞微米ms/rf(混合信號射頻)cmos工藝,利用這種新型工藝提供的新技術(shù)對原有光電二極管進行了改進,使其部分性能顯著改善,并對整個光電集成芯片性能的提高有所幫助。
Laser induced diffusion is a technology that dope the impurities into a certain region of semiconductor by a focused laser . it has the advantages of “ low temperature processing ” and ” direct writing ”, and it is promising to use this technology in the fabrication of monolithically optoelctronic integrated circuits ( oeics ) to solve the incompatibility problem between optoelctronic and electronic components 激光誘導(dǎo)擴散是用聚焦的激光束局域加熱半導(dǎo)體基片,將雜質(zhì)以擴散的方式摻入到特定區(qū)域并且達到一定要求的一種技術(shù),具有“低溫處理”、“直接寫入”、“局域升溫”等獨特優(yōu)點,可有效解決單片光電集成器件(oeics)中光、電兩部分的工藝兼容這一難題。