The critical pulse acceleration or the critical step acceleration for different angles of decline can be got from the research result s . the edge effects of the comb - capacitors having small angle of decline are researched by using the electronics module of the finite element tool ansys 傳感器所能承受的對(duì)應(yīng)不同傾斜角度的最大脈沖加速度或最大階躍加速度可以通過(guò)文中建立的分析模型得到,這對(duì)梳齒電容式傳感器的設(shè)計(jì)可以提供參考。